Effect of H2 dilution on the surface composition of...

Applied Surface Science 1998 Vol. 133; Iss. 1-2

Effect of H2 dilution on the surface composition of plasma-deposited silicon films from SiH4

Denise C Marra, Erik A Edelberg, Ryan L Naone, Eray S Aydil
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Volume:
133
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(98)00214-1
File:
PDF, 620 KB
english, 1998
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