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Structure of nitride film hard coatings prepared by reactive magnetron sputtering
R. Manaila, D. Biro, A. Devenyi, D. Fratiloiu, R. Popescu, J.E. TotoliciVolume:
134
Year:
1998
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(98)00258-x
File:
PDF, 198 KB
english, 1998