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Surface smoothing and patterning of SiC by focused ion beams
R Menzel, T Bachmann, F Machalett, W Wesch, U Lang, M Wendt, C Musil, R MühleVolume:
136
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(98)00333-x
File:
PDF, 3.05 MB
english, 1998