SIO2 thin film preparation using dielectric barrier...

Applied Surface Science 1999 Vol. 138-139; Iss. none

SIO2 thin film preparation using dielectric barrier discharge-driven excimer lamps

Noritaka Takezoe, Atsushi Yokotani, Kou Kurosawa, Wataru Sasaki, Tatsushi Igarashi, Hiromitsu Matsuno
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Volume:
138-139
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(98)00415-2
File:
PDF, 433 KB
english, 1999
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