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Plasma immersion ion implantation for shallow junctions in silicon
I Pintér, A.H Abdulhadi, Zs Makaró, N.Q Khanh, M Ádám, I Bársony, J Poortmans, S Sivoththaman, Hai-Zhi Song, G.J AdriaenssensVolume:
138-139
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(98)00424-3
File:
PDF, 181 KB
english, 1999