Carbon nitride thin films deposited by...

Applied Surface Science 1999 Vol. 138-139; Iss. none

Carbon nitride thin films deposited by nitrogen-ion-assisted KRF excimer ablation of graphite

Lu Yong Feng, Ren Zhong Min, Ni Hai Qiao, He Zi Feng, D.S.H. Chan, Low Teck Seng, Chen Shao Yin, Karunasiri Gamani, Chen Geng, Li Kun
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Volume:
138-139
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(98)00445-0
File:
PDF, 169 KB
english, 1999
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