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Application of Dynamical Optical Reflection Thermography (DORT) for detecting of dark current inhomogeneity in semiconductor devices
S.V Litvinenko, S.S Kilchitskaya, V.A Skryshevsky, V.I Strikha, A LaugierVolume:
137
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(98)00487-5
File:
PDF, 193 KB
english, 1999