Excimer ArF laser with an output energy of 0.5 J and He...

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Excimer ArF laser with an output energy of 0.5 J and He buffer gas

A. A. Zhupikov, A. M. Razhev
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Year:
1997
Language:
english
DOI:
10.1070/QE1997v027n08ABEH001026
File:
PDF, 369 KB
english, 1997
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