Nanoparticles of Si–C–N from low temperature RF plasmas: selective size, composition and structure
G Viera, E Garcı́a-Caurel, J Costa, J.L Andújar, E BertranVolume:
144-145
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(98)00909-x
File:
PDF, 633 KB
english, 1999