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Mechanisms of radiation damage to Sc/Si multilayer mirrors under EUV laser irradiation
Y. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, G. Vaschenko, M. Grisham, C. S. Menoni, J. J. Rocca, I. A. Artioukov, Y. A. Uspenskii, A. V. VinogradovYear:
2009
Language:
english
DOI:
10.1088/0022-3727/42/12/125407
File:
PDF, 1.77 MB
english, 2009