![](/img/cover-not-exists.png)
Damascene Array Structure of Phase Change Memory Fabricated with Chemical Mechanical Polishing Method
L. Qi-bin, S. Zhi-tang, Z. Kai-liang, W. Liang-yong, F. Song-lin, C. BomyYear:
2006
Language:
english
DOI:
10.1088/0256-307X/23/8/091
File:
PDF, 273 KB
english, 2006