An in-depth analysis of the 'Elymat' technique for...

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An in-depth analysis of the 'Elymat' technique for characterizing metallic microcontamination in silicon: Experimental validation for iron contamination in p-type wafers

D. Walz, G. L. Carval, J. -. Joly, G. Kamarinos
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Year:
1995
Language:
english
DOI:
10.1088/0268-1242/10/7/020
File:
PDF, 961 KB
english, 1995
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