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Thermal stability of CoSi2 layers implemented in a silicon-on-insulator substrate
Q. T. Zhao, H. L. Bay, S. Zimmermann, M. Wiemer, C. Kaufmann, B. Trui, H. Höhnemann, V. Dudek, S. MantlYear:
2006
Language:
english
DOI:
10.1088/0268-1242/21/2/010
File:
PDF, 738 KB
english, 2006