Deposition and annealing of tantalum pentoxide films using 172 nm excimer lamp
Jun-Ying Zhang, Boon Lim, Ian W BoydVolume:
154-155
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(99)00387-6
File:
PDF, 123 KB
english, 2000