Pulsed laser deposition of a-CNx:H films: the role of...

Applied Surface Science 2000 Vol. 154-155; Iss. none

Pulsed laser deposition of a-CNx:H films: the role of target-to-substrate distance and laser fluence

P González, R Soto, B León, M Pérez-Amor, T Szörényi
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Volume:
154-155
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(99)00394-3
File:
PDF, 83 KB
english, 2000
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