The influence of ambient temperature on KrF laser ablation...

The influence of ambient temperature on KrF laser ablation of polyimide in air

A Braun, K Zimmer, F Bigl
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Volume:
154-155
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(99)00396-7
File:
PDF, 162 KB
english, 2000
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