On the reaction mechanism in laser-induced deposition of tungsten microstructures from WF6/H2
K Piglmayer, H Schieche, R ChabicovskyVolume:
154-155
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(99)00424-9
File:
PDF, 162 KB
english, 2000