Excimer laser crystallization techniques for polysilicon...

Applied Surface Science 2000 Vol. 154-155; Iss. none

Excimer laser crystallization techniques for polysilicon TFTs

G Fortunato, L Mariucci, R Carluccio, A Pecora, V Foglietti
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Volume:
154-155
Year:
2000
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(99)00475-4
File:
PDF, 523 KB
english, 2000
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