![](/img/cover-not-exists.png)
Optimization of phase-modulated excimer-laser annealing method for growing highly-packed large-grains in Si thin-films
Chang-Ho Oh, Mitsuru Nakata, Masakiyo MatsumuraVolume:
154-155
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(99)00477-8
File:
PDF, 626 KB
english, 2000