Femtosecond pulse laser processing of TiN on silicon
J. Bonse, P. Rudolph, J. Krüger, S. Baudach, W. KautekVolume:
154-155
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(99)00481-x
File:
PDF, 239 KB
english, 2000