Process monitoring of semiconductor thin films and...

Applied Surface Science 2000 Vol. 154-155; Iss. none

Process monitoring of semiconductor thin films and interfaces by spectroellipsometry

R Brenot, B Drévillon, P Bulkin, P Roca i Cabarrocas, R Vanderhaghen
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Volume:
154-155
Year:
2000
Language:
english
Pages:
8
DOI:
10.1016/s0169-4332(99)00501-2
File:
PDF, 201 KB
english, 2000
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