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Current status and future prospect of the Nb-based fabrication process for single flux quantum circuits
M. Hidaka, S. Nagasawa, T. Satoh, K. Hinode, Y. KitagawaYear:
2006
Language:
english
DOI:
10.1088/0953-2048/19/3/020
File:
PDF, 382 KB
english, 2006