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Ge-rich islands grown on patterned Si substrates by low-energy plasma-enhanced chemical vapour deposition

M. Bollani, D. Chrastina, A. Fedorov, R. Sordan, A. Picco, E. Bonera
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Year:
2010
Language:
english
DOI:
10.1088/0957-4484/21/47/475302
File:
PDF, 780 KB
english, 2010
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