Ge-rich islands grown on patterned Si substrates by low-energy plasma-enhanced chemical vapour deposition
M. Bollani, D. Chrastina, A. Fedorov, R. Sordan, A. Picco, E. BoneraYear:
2010
Language:
english
DOI:
10.1088/0957-4484/21/47/475302
File:
PDF, 780 KB
english, 2010