Effects of direct and pulse current on copper...

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Effects of direct and pulse current on copper electrodeposition through photoresist molds

J. Quemper, E. Dufour-gergam, N. Frantz-rodriguez, J. Gilles, J. Grandchamp, A. Bosseboeuf
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Year:
2000
Language:
english
DOI:
10.1088/0960-1317/10/2/303
File:
PDF, 227 KB
english, 2000
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