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Innovative process development for a new micro-tribosensor using surface micromachining
S. Deladi, M. J. D. Boer, G. Krijnen, D. Ros N, M. C. ElwenspoekYear:
2003
Language:
english
DOI:
10.1088/0960-1317/13/4/303
File:
PDF, 434 KB
english, 2003