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Dry followed by wet backside etching processes for micromachined endfire antennae
M. Saadaoui, P. Pons, R. Plana, L. Bary, P. Dubreuil, D. Bourrier, D. Vasilache, D. Neculoiu, A. MüllerYear:
2005
Language:
english
DOI:
10.1088/0960-1317/15/7/010
File:
PDF, 1.21 MB
english, 2005