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New design methodology for MEMS-electronic-package co-design and validation for inertial sensor systems

A. Sanginario, A. Mehdaoui, S. Zerbini, G. Schropfer, D. Demarchi
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Year:
2015
Language:
english
DOI:
10.1109/DTIP.2015.7160975
File:
PDF, 2.36 MB
english, 2015
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