Study of Si Etch Rate in Various Composition of SC1...

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Study of Si Etch Rate in Various Composition of SC1 Solution

H. Kobayashi, J. Ryuta, T. Shingyouji, Y. Shimanuki
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Year:
1993
DOI:
10.1143/JJAP.32.L45
File:
PDF, 439 KB
1993
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