Electron Temperature in RF Discharge Plasma ofCF4/N2Mixture

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Electron Temperature in RF Discharge Plasma ofCF4/N2Mixture

H. Kobayashi, I. Ishikawa, S. Suganomata
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Year:
1994
DOI:
10.1143/JJAP.33.5979
File:
PDF, 313 KB
1994
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