Mechanisms of the Deposition of Hydrogenated Carbon Films

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Mechanisms of the Deposition of Hydrogenated Carbon Films

W. Möller, W. Fukarek, K. Lange, A. V. Keudell, W. Jacob
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Year:
1995
DOI:
10.1143/JJAP.34.2163
File:
PDF, 1.70 MB
1995
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