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Recent Developments in Electrical Linewidth and Overlay Metrology for Integrated Circuit Fabrication Processes
M. W. Cresswell, J. J. Sniegowski, R. N. Ghoshtagore, R. A. Allen, W. F. Guthrie, A. W. Gurnell, L. W. Linholm, R. G. Dixson, E. C. TeagueYear:
1996
DOI:
10.1143/JJAP.35.6597
File:
PDF, 2.52 MB
1996