Mechanism of Etch Stop in High Aspect-Ratio Contact Hole...

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Mechanism of Etch Stop in High Aspect-Ratio Contact Hole Etching

T. Ohiwa, A. Kojima, M. Sekine, I. Sakai, S. Yonemoto, Y. Watanabe
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Year:
1998
DOI:
10.1143/JJAP.37.5060
File:
PDF, 787 KB
1998
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