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Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
C. K. Ande, H. C. M. Knoops, K. De Peuter, M. Van Drunen, S. D. Elliott, W. M. M. KesselsYear:
2015
Language:
english
DOI:
10.1021/acs.jpclett.5b01596
File:
PDF, 868 KB
english, 2015