High-fidelity chemical patterning on oxide-free germanium

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High-fidelity chemical patterning on oxide-free germanium

J. Nathan Hohman, M. Kim, J. A. Lawrence, P. D. Mcclanahan, P. S. Weiss
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Year:
2012
Language:
english
DOI:
10.1088/0953-8984/24/16/164214
File:
PDF, 670 KB
english, 2012
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