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Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based electrothermal actuators
S. Deladi, G. J. M. Krijnen, M. C. ElwenspoekYear:
2004
Language:
english
DOI:
10.1088/0960-1317/14/9/005
File:
PDF, 243 KB
english, 2004