Photo-CVD SiN Assisted Self-Aligned Metal Contact...

  • Main
  • Photo-CVD SiN Assisted Self-Aligned...

Photo-CVD SiN Assisted Self-Aligned Metal Contact Technology for High-Speed GaAs Devices–Recess Gate Structure with High Breakdown Voltage for GaAs FETs–

T. Usagawa, H. Okuhira
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
1988
DOI:
10.1143/JJAP.27.653
File:
PDF, 1.16 MB
1988
Conversion to is in progress
Conversion to is failed