Dielectric Properties of(Pb,La)TiO3Thin Films by...

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Dielectric Properties of(Pb,La)TiO3Thin Films by Multiple-Cathode Sputtering and Its Application to Dynamic Random Access Memory Capacitors

H. Maiwa, N. Ichinose
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Year:
1996
DOI:
10.1143/JJAP.35.4976
File:
PDF, 584 KB
1996
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