Surface Channel Metal Gate Complementary MOS with Light Counter Doping and Single Work Function Gate Electrode
K. T. Nishinohara, Y. Akasaka, T. Saito, A. Yagishita, A. Murakoshi, K. Suguro, T. ArikadoYear:
2001
Language:
english
DOI:
10.1143/JJAP.40.2603
File:
PDF, 219 KB
english, 2001