Reliable Characterization of Microcrystalline Silicon Films for Thin Film Transistor Applications
A. Abramov, P. Roca I Cabarrocas, K. Girotra, H. Chen, S. Park, K. Park, J. Huh, J. Choi, C. Kim, J. H. SoukYear:
2008
Language:
english
DOI:
10.1143/JJAP.47.7308
File:
PDF, 176 KB
english, 2008