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Realization and Simulation of High-Aspect-Ratio Micro/Nanostructures by Proton Beam Writing
E. Valamontes, M. Chatzichristidi, N. Tsikrikas, D. Goustouridis, I. Raptis, C. Potiriadis, J. A. Van Kan, F. WattYear:
2008
Language:
english
DOI:
10.1143/JJAP.47.8600
File:
PDF, 409 KB
english, 2008