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Voltage contrast in integrated circuits with 100 nm spatial resolution by scanning force microscopy
C. Bohm, F. Saurenbach, P. Taschner, C. Roths, E. KubalekYear:
1993
Language:
english
DOI:
10.1088/0022-3727/26/10/041
File:
PDF, 539 KB
english, 1993