![](/img/cover-not-exists.png)
MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators
D. M. Brouwer, B. R. De Jong, M. J. De Boer, H. V. Jansen, J. Van Dijk, G. J. M. Krijnen, H. M. J. R. SoemersYear:
2009
Language:
english
DOI:
10.1088/0960-1317/19/6/065027
File:
PDF, 3.38 MB
english, 2009