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Atomic oxygen radio-frequency source and its application to the treatment of mixed valence copper oxide thin films
O. Guymont, E. L. Duc, D. Pagnon, A. M. Pointu, M. Touzeau, M. Vialle, B. Mercey, H. MurrayYear:
1992
Language:
english
DOI:
10.1088/0963-0252/1/3/005
File:
PDF, 243 KB
english, 1992