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Development of multi-step processing in silicon-on-insulator for optical waveguide applications
K. Solehmainen, T. Aalto, J. Dekker, M. Kapulainen, M. Harjanne, P. HeimalaYear:
2006
Language:
english
DOI:
10.1088/1464-4258/8/7/S22
File:
PDF, 446 KB
english, 2006