Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering
H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, H. KinoshitaYear:
2002
Language:
english
DOI:
10.1143/JJAP.41.5338
File:
PDF, 321 KB
english, 2002