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Characterization of Air-Gap Sealing with Organic Dielectric Using Spin-Coating Film Transfer and Hot-Pressing Technology
N. Sato, K. Machida, H. Ishii, Y. Ishimura, H. Saito, S. Asakuma, M. Kawagoe, H. AdachiYear:
2007
Language:
english
DOI:
10.1143/JJAP.46.7678
File:
PDF, 235 KB
english, 2007