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High-Accuracy Proximity Effect Correction for Mask Writing
T. Abe, Y. Hattori, T. Iijima, H. Anze, S. Oogi, T. Kamikubo, S. Tsuchiya, M. Shimizu, K. Matsuki, H. Inoue, T. Tojo, T. TakigawaYear:
2007
Language:
english
DOI:
10.1143/JJAP.46.826
File:
PDF, 505 KB
english, 2007