Effect of Oxygen Impurities on Thermal Diffusivity of AlN...

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Effect of Oxygen Impurities on Thermal Diffusivity of AlN Thin Films Deposited by Reactive RF Magnetron Sputtering

T. Yagi, N. Oka, T. Okabe, N. Taketoshi, T. Baba, Y. Shigesato
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Year:
2011
Language:
english
DOI:
10.1143/JJAP.50.11RB01
File:
PDF, 472 KB
english, 2011
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