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A novel method combining Monte Carlo–FEM simulations and experiments for simultaneous evaluation of the ultrathin film mass density and Young׳s modulus
J. Zapoměl, I. Stachiv, P. FerfeckiYear:
2015
Language:
english
DOI:
10.1016/j.ymssp.2015.06.022
File:
PDF, 1.41 MB
english, 2015