Reaction of SiH 4 with UF 6 and/or HF below 25 °C

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Reaction of SiH 4 with UF 6 and/or HF below 25 °C

W. V. Cicha, J. H. Wang, J. Covey
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Year:
1994
Language:
english
DOI:
10.1021/bk-1994-0555.ch011
File:
PDF, 2.36 MB
english, 1994
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